Direct Simulation Monte Carlo Analysis of Rarefied Gas Flow Structures and Ventilation of Etching Gas in Magnetomicrowave Plasma Etcing Reactors

By: Material type: ArticleArticleDescription: 476-482 pSubject(s): In: Transactions ofAsme, Journal of Fluids Engineering
Holdings
Item type Current library Call number Vol info Status Date due Barcode
Articles Articles Periodical Section Vol.124, No.02 (Jun. 2002) Available