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Direct Simulation Monte Carlo Analysis of Rarefied Gas Flow Structures and Ventilation of Etching Gas in Magnetomicrowave Plasma Etcing Reactors

Ikegawa, Masato

Direct Simulation Monte Carlo Analysis of Rarefied Gas Flow Structures and Ventilation of Etching Gas in Magnetomicrowave Plasma Etcing Reactors - 476-482 p.

Subjects--Topical Terms:
Direct Simulstion
Structure from Motion

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