The Protective Efect of Thin Amorphous Hydrogenated Carbon A-C: H Films During Metallisation of Metal-Carbon -Oxide-Silicon (Mcos) Diodes

By: Material type: ArticleArticleDescription: 877-880 pSubject(s): In: Microelectronics Journal
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Articles Articles Periodical Section Vol.34, No.09 (Sep. 2003) Available