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The Protective Efect of Thin Amorphous Hydrogenated Carbon A-C: H Films During Metallisation of Metal-Carbon -Oxide-Silicon (Mcos) Diodes

Balachova, O V

The Protective Efect of Thin Amorphous Hydrogenated Carbon A-C: H Films During Metallisation of Metal-Carbon -Oxide-Silicon (Mcos) Diodes - 877-880 p.

Subjects--Topical Terms:
Amorphous Silicon
Hydrogenating Rates
Carbon

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