A Reliability of Barrier-Metal-Clad Copper Interconnects with Self-Aligned Metallic Caps (Record no. 757546)

MARC details
000 -LEADER
fixed length control field 00552nab a2200157Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 230808s2004 |||||||f |||| 00| 0 eng d
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Tatsuyuki, Saito
9 (RLIN) 803074
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Ashihara, Hiroshi
9 (RLIN) 277288
245 #2 - TITLE STATEMENT
Title A Reliability of Barrier-Metal-Clad Copper Interconnects with Self-Aligned Metallic Caps
300 ## - PHYSICAL DESCRIPTION
Extent 2129-2135 p.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Chemical Vapor Deposition (Cvd)
9 (RLIN) 688088
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Copper Losses
9 (RLIN) 788523
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Electromigration
9 (RLIN) 777428
773 ## - HOST ITEM ENTRY
Place, publisher, and date of publication 2004
Title Ieee Transactions on Electron Devices
International Standard Serial Number 00189383
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Articles
-- 51
-- ABUL KALAM Library
Holdings
Not for loan Home library Serial Enumeration / chronology Total Checkouts Date last seen Koha item type
  Engr Abul Kalam Library Vol.51, No.12 (Dec. 2004)   19/08/2023 Articles