Planarized Multilevel Interconnection Using Chemical Mechanical Polishing of Selective Cvd-Ai Via Plugs (Record no. 745275)

MARC details
000 -LEADER
fixed length control field 00600nab a2200169Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 230808s1998 |||||||f |||| 00| 0 eng d
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Amazawa, Takao
9 (RLIN) 780571
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Arita, Yoshinobu
9 (RLIN) 780572
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Yamamoto, EIIchi
9 (RLIN) 780573
245 #0 - TITLE STATEMENT
Title Planarized Multilevel Interconnection Using Chemical Mechanical Polishing of Selective Cvd-Ai Via Plugs
300 ## - PHYSICAL DESCRIPTION
Extent 815-820 p.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Aluminum Integrated Circuit Conductors
9 (RLIN) 780574
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Electromigration
9 (RLIN) 777428
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Cmp
9 (RLIN) 769397
773 ## - HOST ITEM ENTRY
Place, publisher, and date of publication 1998
Title IEEE Transactions on Electron Devices
International Standard Serial Number 00189383
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Articles
-- 51
-- ABUL KALAM Library
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Not for loan Home library Serial Enumeration / chronology Total Checkouts Date last seen Koha item type
  Engr Abul Kalam Library Vol.45, No.04 (Apr. 1998)   19/08/2023 Articles