Process Integration of an Interlevel Dielectric (Ildo) Module Using a Buildin-In Reliability Approach (Record no. 745112)

MARC details
000 -LEADER
fixed length control field 00581nab a2200169Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 230808s1998 |||||||f |||| 00| 0 eng d
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Paulsen, Ronald E.
9 (RLIN) 779889
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Kyono, Carl S.
9 (RLIN) 779890
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Reno, Chris
9 (RLIN) 780214
245 #0 - TITLE STATEMENT
Title Process Integration of an Interlevel Dielectric (Ildo) Module Using a Buildin-In Reliability Approach
300 ## - PHYSICAL DESCRIPTION
Extent 655-664 p.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Cmos Memory
9 (RLIN) 779892
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Gettering
9 (RLIN) 770962
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Ic Fabrication Industry
9 (RLIN) 780215
773 ## - HOST ITEM ENTRY
Place, publisher, and date of publication 1998
Title IEEE Transactions on Electron Devices
International Standard Serial Number 00189383
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Articles
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-- ABUL KALAM Library
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Not for loan Home library Serial Enumeration / chronology Total Checkouts Date last seen Koha item type
  Engr Abul Kalam Library Vol.45, No.03 (Mar. 1998)   19/08/2023 Articles