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Process Integration of an Interlevel Dielectric (Ildo) Module Using a Buildin-In Reliability Approach

Paulsen, Ronald E. Kyono, Carl S. Reno, Chris

Process Integration of an Interlevel Dielectric (Ildo) Module Using a Buildin-In Reliability Approach - 655-664 p.

Subjects--Topical Terms:
Cmos Memory
Gettering
Ic Fabrication Industry

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