High-Throughput Electron Beam Direct Writing of Via Layers by Character Projection with one-Dimensional Via Characters (Record no. 720335)

MARC details
000 -LEADER
fixed length control field 00661nab a2200169Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 230808s2013 |||||||f |||| 00| 0 eng d
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Ikeno, Rimon
9 (RLIN) 713986
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Maruyama, Takashi
9 (RLIN) 713987
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Komatsu, Satoshi
9 (RLIN) 713988
245 #0 - TITLE STATEMENT
Title High-Throughput Electron Beam Direct Writing of Via Layers by Character Projection with one-Dimensional Via Characters
300 ## - PHYSICAL DESCRIPTION
Extent 2458-2466 p.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Electron Beam Direct Writing
9 (RLIN) 713989
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Character Projection
9 (RLIN) 713990
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Via
9 (RLIN) 713991
773 ## - HOST ITEM ENTRY
Place, publisher, and date of publication 2013
Title IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences
International Standard Serial Number 09168508
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Articles
-- 51
-- ABUL KALAM Library
Holdings
Not for loan Home library Serial Enumeration / chronology Total Checkouts Date last seen Koha item type
  Engr Abul Kalam Library Vol.E96-A, No.12 (Dec. 2013)   19/08/2023 Articles