High-Throughput Electron Beam Direct Writing of Via Layers by Character Projection with one-Dimensional Via Characters (Record no. 720335)
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000 -LEADER | |
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fixed length control field | 00661nab a2200169Ia 4500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 230808s2013 |||||||f |||| 00| 0 eng d |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Ikeno, Rimon |
9 (RLIN) | 713986 |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Maruyama, Takashi |
9 (RLIN) | 713987 |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Komatsu, Satoshi |
9 (RLIN) | 713988 |
245 #0 - TITLE STATEMENT | |
Title | High-Throughput Electron Beam Direct Writing of Via Layers by Character Projection with one-Dimensional Via Characters |
300 ## - PHYSICAL DESCRIPTION | |
Extent | 2458-2466 p. |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Electron Beam Direct Writing |
9 (RLIN) | 713989 |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Character Projection |
9 (RLIN) | 713990 |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name entry element | Via |
9 (RLIN) | 713991 |
773 ## - HOST ITEM ENTRY | |
Place, publisher, and date of publication | 2013 |
Title | IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences |
International Standard Serial Number | 09168508 |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | Articles |
-- | 51 |
-- | ABUL KALAM Library |
Not for loan | Home library | Serial Enumeration / chronology | Total Checkouts | Date last seen | Koha item type |
---|---|---|---|---|---|
Engr Abul Kalam Library | Vol.E96-A, No.12 (Dec. 2013) | 19/08/2023 | Articles |