Normal view MARC view ISBD view

High-Throughput Electron Beam Direct Writing of Via Layers by Character Projection with one-Dimensional Via Characters

Ikeno, Rimon Maruyama, Takashi Komatsu, Satoshi

High-Throughput Electron Beam Direct Writing of Via Layers by Character Projection with one-Dimensional Via Characters - 2458-2466 p.

Subjects--Topical Terms:
Electron Beam Direct Writing
Character Projection
Via

Print
Request article
Suggest for purchase
Send to device
Save record
BIBTEX Dublin Core ISBD MARCXML RIS
More searches

Search for this title in:
Other Databases (Google Scholar) Open Library (openlibrary.org) Pakistan Union Catalogue (pastic.gov.pk) Other Libraries (WorldCat)