A Simulation Study of Long Throw Sputtering for Diffusion Barrier Deposition Into High Aspect Vias and Contacts
Smyth, T. Tan, liang Chan, K.
A Simulation Study of Long Throw Sputtering for Diffusion Barrier Deposition Into High Aspect Vias and Contacts - 1414-1425 p.
Integrated Circuit Metalilzation
Semiconductor Process Modeling
Simulation
A Simulation Study of Long Throw Sputtering for Diffusion Barrier Deposition Into High Aspect Vias and Contacts - 1414-1425 p.
Integrated Circuit Metalilzation
Semiconductor Process Modeling
Simulation