| 000 | 00570nab a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s1999 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aFujita, Hideaki _9853239 |
||
| 100 |
_aAkagi, Hirofumi _9711998 |
||
| 100 |
_aShinohara, Shin-Ichi _9853242 |
||
| 245 | 2 | _aA 2-Mhz 6-K Va Voltage-Source Inverter Usinglow-Profile Mosfet Modules for Low-Tempertureplasma Generators. | |
| 300 | _a1014-1020 p. | ||
| 650 |
_aDevice Packaging _9853243 |
||
| 650 |
_aLow Temperature Plasma _9784358 |
||
| 773 |
_d1999 _tIeee Transactions on PowerElectronics _x08858993 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c794477 _d794477 |
||