000 00453nab a2200133Ia 4500
008 230808s2001 |||||||f |||| 00| 0 eng d
100 _aHaith, Douglas A
_9126894
100 _aPrice, Thomas E
_9825116
245 2 _aA Silicon -Etched Probe for 3-D Coordinate Measurements with An Uncertiniry Below 0.1 Um
300 _a1524-1529 p.
650 _aIntroduction
773 _d2001
_tIeee Transactions on Robotics and Automation
_x1042296X
942 _cART
_o51
_pABUL KALAM Library
999 _c774749
_d774749