000 | 00456nab a2200133Ia 4500 | ||
---|---|---|---|
008 | 230808s2002 |||||||f |||| 00| 0 eng d | ||
100 |
_aVerma, Gita Dewan _9819499 |
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100 |
_aTalwar, S _9823357 |
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245 | 0 | _a for mation of Titanium Silicide on Narrow Gates Using Laser Thermal Processing | |
300 | _a42-47 p. | ||
650 |
_aMaterials Processing and Packaging _9800240 |
||
773 |
_d2002 _tIeee Transactions on Electron Devices _x00189383 |
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942 |
_cART _o51 _pABUL KALAM Library |
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999 |
_c773797 _d773797 |