000 00456nab a2200133Ia 4500
008 230808s2002 |||||||f |||| 00| 0 eng d
100 _aVerma, Gita Dewan
_9819499
100 _aTalwar, S
_9823357
245 0 _a for mation of Titanium Silicide on Narrow Gates Using Laser Thermal Processing
300 _a42-47 p.
650 _aMaterials Processing and Packaging
_9800240
773 _d2002
_tIeee Transactions on Electron Devices
_x00189383
942 _cART
_o51
_pABUL KALAM Library
999 _c773797
_d773797