000 00555nab a2200181Ia 4500
008 230808s2002 |||||||f |||| 00| 0 eng d
100 _aEarles, S
_9822263
100 _aLaw, M
_9822265
100 _aBrindos, R
_9822266
100 _aJones, K
_9822267
245 0 _aNonmelt Laser Annealing of 5-Ke V and 1-Ke V Boron-Implanted Silicon
300 _a1118-1123 p.
650 _aBoron
_9404074
650 _aHeavily Doped
_9779967
650 _aLaser Annealing
_9775474
773 _d2002
_tIeee Transactions on Electron Devices
_x00189383
942 _cART
_o51
_pABUL KALAM Library
999 _c772956
_d772956