| 000 | 00470nab a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s2002 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aTanaka, Masanori _9796025 |
||
| 245 | 0 | _aSuppression of Sin-Induced Boron Penetration By Using Sih-Free Silicon Nitride Films for med By Terachlorosilane and Ammonia | |
| 300 | _a1526-1531 p. | ||
| 650 |
_aMaterial Processing and Packaging _9822170 |
||
| 773 |
_d2002 _tIeee Transactions on Electron Devices _x00189383 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c772866 _d772866 |
||