| 000 | 00419nab a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s2002 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aLee, J H _9677124 |
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| 245 | 0 | _aDual Damascene Advanced Interconects; New Copper Seed Layer Enhamcement Process Metrology Using Ion Chromatography | |
| 300 | _a945-953 p. | ||
| 650 |
_aCopper Conductor _9813394 |
||
| 773 |
_d2002 _tMicroelectronics Journal _x00262692 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c772532 _d772532 |
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