| 000 | 00398nab a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s2002 |||||||f |||| 00| 0 eng d | ||
| 100 | _aLee, S .L. | ||
| 245 | 0 | _aChemical Mechanical Polishing of Thermal Oxide Films Using Silics Particles Coated with Ceria | |
| 300 | _a2744-2749 p. | ||
| 650 |
_aThermal Ability _9776864 |
||
| 773 |
_d2002 _tJournal of Materials Research _x08842914 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c768719 _d768719 |
||