| 000 | 00430nab a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s2002 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aZhou, H _9811801 |
||
| 245 | 0 | _aOptical Properties of Pecvd Dielectric Thin Films: Thickness and Deposition Method Depdence | |
| 300 | _a999-1004 p. | ||
| 650 |
_aPlasma _9115419 |
||
| 650 |
_aThickness Dependent _9810168 |
||
| 773 |
_d2002 _tMicroelectronics Journal _x00262692 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c765412 _d765412 |
||