000			00517nab a2200145Ia 4500
008			230808s2003 |||||||f |||| 00| 0 eng d
100			_aBalachova, O V _9810901
245		4	_aThe Protective Efect of Thin Amorphous Hydrogenated Carbon A-C: H Films During Metallisation of Metal-Carbon -Oxide-Silicon (Mcos) Diodes
300			_a877-880 p.
650			_aAmorphous Silicon
650			_aHydrogenating Rates _9808933
650			_aCarbon _950196
773			_d2003 _tMicroelectronics Journal _x00262692
942			_cART _o51 _pABUL KALAM Library
999			_c763486 _d763486