000			00388nab a2200121Ia 4500
008			230808s2004 |||||||f |||| 00| 0 eng d
100			_aWu, J H _9764242
245		2	_aA Through-Wafer Interconnect in Silicon for Rfics
300			_a1765-1771 p.
650			_aMaterials Processing and Packaging _9800240
773			_d2004 _tIeee Transactions on Electron Devices _x00189383
942			_cART _o51 _pABUL KALAM Library
999			_c757354 _d757354