000 | 00517nab a2200157Ia 4500 | ||
---|---|---|---|
008 | 230808s2004 |||||||f |||| 00| 0 eng d | ||
100 |
_aPan, J _9237797 |
||
100 |
_aWoo, Christy _9802601 |
||
245 | 4 | _aThe Effect of Annealing Temperatures on Self-Ailned Replacement (Damascene) Tacn-Tan-Stacked Gate Pmosfets | |
300 | _a581-586 p. | ||
650 |
_aCarbon _950196 |
||
650 |
_aMetal Gate _9800730 |
||
650 |
_aPmosfets _9778081 |
||
773 |
_d2004 _tIeee Transactions on Electron Devices _x00189383 |
||
942 |
_cART _o51 _pABUL KALAM Library |
||
999 |
_c757260 _d757260 |