000 00379nab a2200121Ia 4500
008 230808s2005 |||||||f |||| 00| 0 eng d
100 _aSheu, Y M
_9796949
245 0 _aModeling Mechanical Stress Effect on Dopant Diffusion in Scaled Mosfets
300 _a30-38 p.
650 _aSilicon Devices
773 _d2005
_tIeee Transactions on Electron Devices
_x00189383
942 _cART
_o51
_pABUL KALAM Library
999 _c753433
_d753433