000 00414nab a2200121Ia 4500
008 230808s2005 |||||||f |||| 00| 0 eng d
100 _aO'Mahony, C
_9794431
245 0 _aLow-Voltage Micromechanical Test Structures for Measurement of Residual Charge in Dielectrics
300 _a409-410 p.
650 _aInstrumentation and Measurement
773 _d2005
_tIET:IEE: Electronics Letters
_x00135194
942 _cART
_o51
_pABUL KALAM Library
999 _c752074
_d752074