| 000 | 00629nab a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s1992 |||||||f |||| 00| 0 eng d | ||
| 100 | _aMozumder, Purnendu K. | ||
| 100 |
_aLowenstein, Lee M. _9791795 |
||
| 245 | 0 | _aMethod for Semiconductor Process Optimization Using Functional Representations of Spatial Variations and Selectivity | |
| 300 | _a311-316 p. | ||
| 650 |
_aSemiconductor Process Modeling _9776391 |
||
| 650 |
_aOptimization Formulation _9791797 |
||
| 650 |
_aFunctional Representation _9791798 |
||
| 773 |
_d1992 _tIEEE Transactions on Components Hybrids and Manufacturing Technology _x01486411 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c750402 _d750402 |
||