000 00470nab a2200145Ia 4500
008 230808s2007 |||||||f |||| 00| 0 eng d
100 _aOkamoto, S
_9789361
245 0 _aFabrication of Vertical Periodic Structure on Inp and Gaas Using only Etching Gas
300 _a1233-1233 p.
650 _aSemiconductor Technology
_9756520
650 _aFabrication
650 _aVertical Angles
_9789363
773 _d2007
_tIET:IEE: Electronics Letters
_x00135194
942 _cART
_o51
_pABUL KALAM Library
999 _c749187
_d749187