| 000 | 00600nab a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s1998 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aAmazawa, Takao _9780571 |
||
| 100 |
_aArita, Yoshinobu _9780572 |
||
| 100 |
_aYamamoto, EIIchi _9780573 |
||
| 245 | 0 | _aPlanarized Multilevel Interconnection Using Chemical Mechanical Polishing of Selective Cvd-Ai Via Plugs | |
| 300 | _a815-820 p. | ||
| 650 |
_aAluminum Integrated Circuit Conductors _9780574 |
||
| 650 |
_aElectromigration _9777428 |
||
| 650 |
_aCmp _9769397 |
||
| 773 |
_d1998 _tIEEE Transactions on Electron Devices _x00189383 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c745275 _d745275 |
||