| 000 | 00581nab a2200169Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s1998 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aPaulsen, Ronald E. _9779889 |
||
| 100 |
_aKyono, Carl S. _9779890 |
||
| 100 |
_aReno, Chris _9780214 |
||
| 245 | 0 | _aProcess Integration of an Interlevel Dielectric (Ildo) Module Using a Buildin-In Reliability Approach | |
| 300 | _a655-664 p. | ||
| 650 |
_aCmos Memory _9779892 |
||
| 650 |
_aGettering _9770962 |
||
| 650 |
_aIc Fabrication Industry _9780215 |
||
| 773 |
_d1998 _tIEEE Transactions on Electron Devices _x00189383 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c745112 _d745112 |
||