000 00555nab a2200169Ia 4500
008 230808s1999 |||||||f |||| 00| 0 eng d
100 _aGoto, Ken-Ichi
_9777221
100 _aWatanabe, Junji
_9718761
100 _aSukegawa, Takae
_9777223
245 2 _aA Newleakage Mechanism of Co Salicide and Optimzed Process Conditions
300 _a117-124 p.
650 _aNew Landfili Look
_9777224
650 _aOptimized Control Method
_9749518
650 _aProcess
_9172834
773 _d1999
_tIEEE Transactions on Electron Devices
_x00189383
942 _cART
_o51
_pABUL KALAM Library
999 _c743867
_d743867