000 | 00518nab a2200169Ia 4500 | ||
---|---|---|---|
008 | 230808s1998 |||||||f |||| 00| 0 eng d | ||
100 |
_aHorstmann, John T. _9776346 |
||
100 |
_aGoser, Karl F. _9776347 |
||
100 |
_aHilieringmann, Ulrich _9776348 |
||
245 | 0 | _aMatching Analysis of Deposition Defined 50-Nm Mosfet'S | |
300 | _a299-306 p. | ||
650 |
_aMatching _9761606 |
||
650 |
_aDeposition _9679258 |
||
650 | _aMosfets | ||
773 |
_d1998 _tIEEE Transactions on Electron Devices _x00189383 |
||
942 |
_cART _o51 _pABUL KALAM Library |
||
999 |
_c743533 _d743533 |