000 00518nab a2200169Ia 4500
008 230808s1998 |||||||f |||| 00| 0 eng d
100 _aHorstmann, John T.
_9776346
100 _aGoser, Karl F.
_9776347
100 _aHilieringmann, Ulrich
_9776348
245 0 _aMatching Analysis of Deposition Defined 50-Nm Mosfet'S
300 _a299-306 p.
650 _aMatching
_9761606
650 _aDeposition
_9679258
650 _aMosfets
773 _d1998
_tIEEE Transactions on Electron Devices
_x00189383
942 _cART
_o51
_pABUL KALAM Library
999 _c743533
_d743533