000 00554nab a2200133Ia 4500
008 230808s1995 |||||||f |||| 00| 0 eng d
100 _aKubacki, Ronald M.
_9775442
245 0 _aLow Temperature Plasma Deposition of Silicon Nitride to Produce Ultra-Reliable High Performance Low Cost Sealed Chip-on-Boand (Scob) Assemblies
300 _a471-477 p.
650 _aTemperature Plasma
_9775443
650 _aHigh Performance
_9170051
773 _d1995
_tIEEE Transactions on Components Packaging and Manufacturing Technology Part A
_x10709886
942 _cART
_o51
_pABUL KALAM Library
999 _c743136
_d743136