000 | 00610nab a2200169Ia 4500 | ||
---|---|---|---|
008 | 230808s1995 |||||||f |||| 00| 0 eng d | ||
100 |
_aMulier, H _9773438 |
||
100 |
_aYuan, Yanrong _9773439 |
||
100 |
_aSheets, Ronald E. _9773441 |
||
245 | 0 | _aLargge Area Fine line Patterning by Scanning Projection lithography | |
300 | _a33-36 p. | ||
650 |
_alithography _955168 |
||
650 |
_aLarge Angle Bends _9773444 |
||
650 |
_aLaser Absorption Sensor _9773446 |
||
773 |
_d1995 _tIEEE Transactions on Components, Packaging, and Manufacturing Technology Part-B: Advanced Packaging _x10709894 |
||
942 |
_cART _o51 _pABUL KALAM Library |
||
999 |
_c742290 _d742290 |