000 00610nab a2200169Ia 4500
008 230808s1995 |||||||f |||| 00| 0 eng d
100 _aMulier, H
_9773438
100 _aYuan, Yanrong
_9773439
100 _aSheets, Ronald E.
_9773441
245 0 _aLargge Area Fine line Patterning by Scanning Projection lithography
300 _a33-36 p.
650 _alithography
_955168
650 _aLarge Angle Bends
_9773444
650 _aLaser Absorption Sensor
_9773446
773 _d1995
_tIEEE Transactions on Components, Packaging, and Manufacturing Technology Part-B: Advanced Packaging
_x10709894
942 _cART
_o51
_pABUL KALAM Library
999 _c742290
_d742290