| 000 | 00526nab a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s2001 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aShaw, D. G _9768396 |
||
| 100 |
_aChang, Jassy _9768398 |
||
| 245 | 2 | _aA Method to ImproveEfficiency of Cmp Process | |
| 300 | _a661-666 p. | ||
| 650 |
_aChemical Mechanical Polishing _9768400 |
||
| 650 |
_aClamping Conditions _9768401 |
||
| 650 |
_aEfficiency Improvement _9758396 |
||
| 773 |
_d2001 _tIEEE Transactions on Components and Packaging Technologies _x15213331 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c740327 _d740327 |
||