| 000 | 00418nab a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 230808s2007 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aMastropaolo, E. _9765736 |
||
| 245 | 0 | _aReactive Ion Etching of Zinc Oxide (Zno) in Sici4 Based Plasmas | |
| 300 | _a1467-1468 p. | ||
| 650 |
_aSemiconductor Technology _9756520 |
||
| 650 |
_aOxide _983600 |
||
| 773 |
_d2007 _tIET:Iee: Electronics Letters _x00135194 |
||
| 942 |
_cART _o51 _pABUL KALAM Library |
||
| 999 |
_c739114 _d739114 |
||