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| 008 | 230808s2013 |||||||f |||| 00| 0 eng d | ||
| 100 |
_aIkeno, Rimon _9713986 |
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| 100 |
_aMaruyama, Takashi _9713987 |
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| 100 |
_aKomatsu, Satoshi _9713988 |
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| 245 | 0 | _aHigh-Throughput Electron Beam Direct Writing of Via Layers by Character Projection with one-Dimensional Via Characters | |
| 300 | _a2458-2466 p. | ||
| 650 |
_aElectron Beam Direct Writing _9713989 |
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| 650 |
_aCharacter Projection _9713990 |
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| 650 |
_aVia _9713991 |
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| 773 |
_d2013 _tIEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences _x09168508 |
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| 942 |
_cART _o51 _pABUL KALAM Library |
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| 999 |
_c720335 _d720335 |
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