000 00737nam a2200217Ia 4500
008 070615s2006||||xx |||||||||||||| ||eng||
020 _a0824724313
022 _l0-8247-2431-3
041 _aeng
082 _a620.5
_bJAC
100 _aJackson, Mark J.
_eED
_916310
245 0 _aMicrofabrication and Nanomanufacturing
260 _aBoca Raton :
_bCrc/Taylor and Francis,
_cc2006
300 _a401 p.
_b: ill
504 _aYY
650 _aIntegrated Circuits Design and Construction
650 _aMicroelectromechanical Systems
_924697
650 0 _aMicroelectronics
_919062
856 _yTable of Contents
_uhttps://eaklibrary.neduet.edu.pk:8443/catalog/bk/books/toc/0-8247-2431-3.pdf
942 _cBOO
_o51
_pAbul Kalam Library
999 _c366203
_d366203