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Mems and Nems Systems Devices and Structures by
  • Lysherski, Sergey Edward [author]
Series: Nano and Microscience Engineering Technology and Medicine Series
Material type: Text Text
Language: English
Publication details: Boca Raton : CRC Press, c2002
Online access:
Availability: Items available for loan: Circulation Section (1)Location, call number: Circulation Section 621.381 LYS.
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Mems and Microsystems Design and Manufacture by
  • Hsu, Tai-Ran [author]
Material type: Text Text
Language: English
Publication details: Boston : McGraw-Hill, 2002
Online access:
Availability: Items available for loan: Circulation Section (1)Location, call number: Circulation Section 621.381 HSU.
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