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		Optimization Study of Vlsi Interconnect Parameters by Anand, M Kakumu, Masakazu Shibata, Hideki Source: IEEE Transactions on Electron Devices Material type: Article; Format: print Availability: Items available for loan: Engr Abul Kalam Library (1). Request article
		A Simulation Study of Long Throw Sputtering for Diffusion Barrier Deposition Into High Aspect Vias and Contacts by Smyth, T Tan, liang Chan, K Source: IEEE Transactions on Electron Devices Material type: Article; Format: print Availability: Items available for loan: Engr Abul Kalam Library (1). Request article
		A SimulatIIon Study of Long Throw Sputtering for Diffusion Barrier Deposition Into Gigh Aspect Vias and Contacts by Smy, Tom Tan, liang Broughton, James N Source: IEEE Transactions on Electron Devices Material type: Article; Format: print Availability: Items available for loan: Engr Abul Kalam Library (1). Request article

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