TY  - SER
AU  - Yeh, Kuo-Lang
AU  - Jeng, Ming-Jer
AU  - Hwu, Jenn-Gwo
TI  - Effect of Oxidation Pressure onCharacteristics of Fluorinated Thin Gate Oxides Prepared By Room Temperature Deposition Followed By Rapid Thermal Oxidation
KW  - Liquid Phase Deposition
KW  - Rapid Thermal Oxidation
KW  - Oxide Breakdown Field
ER  -