TY  - SER
AU  - Chen, Guang-Hao
AU  - Fu, L. -C
AU  - Lin, M. H
AU  - Huang, A. Q
TI  - Petri-Net and Ga-Based Approach to Modeling, Scheduling, and Performance Evaluation   for  Wafer Fabrication
KW  - Genetic Algorithm
KW  - Modelling and Sheduling
KW  - Petrinet
ER  -