TY  - SER
AU  - Earles, S
AU  - Law, M
AU  - Brindos, R
AU  - Jones, K
TI  - Nonmelt Laser Annealing of 5-Ke V and 1-Ke V Boron-Implanted Silicon
KW  - Boron
KW  - Heavily Doped
KW  - Laser Annealing
ER  -