Ikegawa, Masato <br/><br/>
Direct Simulation Monte Carlo Analysis of Rarefied Gas Flow Structures and Ventilation of Etching Gas in Magnetomicrowave Plasma Etcing Reactors 

 - 476-482 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Direct Simulstion<br/>Structure from  Motion