Suzuki, K Sudo, R Tashiro, H <br/><br/>
Estimating Lateral Straggling of Indium Implanted Into Crystalline Silicon 

 - 1312-1313 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Indium<br/>Ion Implantation<br/>Lateral Straggling