TY  - SER
AU  - Karkkainen, A.H.O.
AU  - Rantala, J.T.
AU  - Descour, M.R.
TI  - Fabrication of Micro-Optical Structures By Applying Negative tone Hybrid Glass Materials and Greyscale Lithography
KW  - Integrated Optoelectronics
KW  - Miniaturisation of Optical System
ER  -