TY  - SER
AU  - Zhou, H
AU  - Shi, F.G.
AU  - Zhao, Banghua
TI  - Thickness Dependent Dielectric Breakdown of Pecvd Low-K Carbon  Doped Silicon Dioxide Dielectric Thin Films: Modeling and Experiments
KW  - Thickness Dependent
KW  - Dielectric
KW  - Plasma
ER  -