TY  - SER
AU  - Balachova, O V
TI  - The Protective Efect of Thin Amorphous Hydrogenated Carbon  A-C: H Films During Metallisation of Metal-Carbon -Oxide-Silicon (Mcos) Diodes
KW  - Amorphous Silicon
KW  - Hydrogenating Rates
KW  - Carbon
ER  -