Zhang, Shengong Han, Ruqi Huang, Ru <br/><br/>
A Viable Self-Aligned Bottom-Gate Mos Transistor Technology  for  Deep Submicron 3-D Sram 

 - 1952-1960 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mosfet<br/>Sram