Kunikiyo, Tatsuya Watanabe, Tetsuya <br/><br/>
Test Structure Measuring Inter- and Interlayer Coupling Capacitance of Interconnection with Subfemtofarad Resolution 

 - 726-735 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Capacitance Measurement<br/>Integrated Circuit