Yarn, K. F. Liao, C. I. <br/><br/>
Enhanced Characteristics in Gate-Recessed and Sidewall-Recessed Algaas/Ingasa Phemts By Citric-Based Selective Wet Etching 

 - 67-80 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>E-Phemts<br/>D-Phemts<br/>Gate-Recessed