TY  - SER
AU  - Dolhert, Leonard E.
AU  - Enloe, Jack H.
AU  - Luh, Elilce Y.
TI  - Design of Metalilzations and Components  for  Aluminum Nitride Packages  for  Vlsic
KW  - Metalilzation
KW  - Components
KW  - Aluminum Nitride
ER  -